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| Year of Publication |
2004
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| Journal |
Journal of materials processing technology
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| Volume |
148
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| Number of Pages |
50–56
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| Download citation |
Publications
Numerical study of photolithography system: electromagnetic differential method
Professor of Physics
Citation: 1.Numerical study of photolithography system: electromagnetic differential method. Journal of materials processing technology. 2004;148:50–56.
In: Journal of materials processing technology
Published by: Elsevier , 2004
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Cited by: